Fit coefficients for revised Bohdansky formula (eq.10) in ref.:
``Sputtering Data", W.Eckstein, C. Gracia-Rosales, J.Roth, W.Ottenberger,
IPP 9/82   , February 1993
Table 3, page 335
==============================================================================================================
     \Project.   H        D        T        He       C        O    self-sput    Ne       Ar       Kr       Xe
Target\         101      201      301      402     1206     1608      0        2010     4018     8436    13154

Lithium          703
Es = 1.67eV
M2/M1           6.88     3.45     2.30     1.73     0.58     0.43        1     0.34     0.17     0.08     0.05
ETF(eV)          185      209      232      557     3506     6014     1129     9345    33553   156426   401359
Eth(eV)         6.22     6.92     8.03     9.10    15.94    18.61    11.94    21.11    30.65    46.03    58.91
Q(atoms/ion)    0.10     0.16     0.21     0.40     1.37     1.82     0.69     2.24     3.72     6.41     8.66

Beryllium        904
Es = 3.38eV
M2/M1           8.94     4.47     2.99     2.25     0.75     0.56        1     0.45     0.23     0.11     0.07
ETF(eV)          256      282      308      720     4153     6971     2208    10660    36842   167016   423799
Eth(eV)        12.99    13.09    14.69    16.40    28.08    32.71    24.17    37.07    53.76    80.70   103.28
Q(atoms/ion)    0.07     0.11     0.14     0.28     1.00     1.35     0.67     1.68     2.86     5.01     6.81

Bor             1105
Es = 5.73eV
M2/M1          10.73     5.37     3.59     2.70     0.90     0.68        1     0.54     0.27     0.13     0.08
ETF(eV)          333      361      389      894     4856     8021     3717    12115    40627   179955   452343
Eth(eV)        23.14    21.56    23.46    25.83    43.25    50.30    40.97    56.95    82.48   123.75   158.37
Q(atoms/ion)    0.05     0.08     0.11     0.21     0.80     1.08     0.67     1.36     2.36     4.18     5.70

Graphite        1206
Es = 7.42eV
M2/M1          11.92     5.96     3.98     3.00     1.00     0.75        1     0.60     0.30     0.14     0.09
ETF(eV)          415      447      479     1087     5688     9298     5688    13933    45800   199619   498376
Eth(eV)        31.11    27.64    29.48    32.15    52.98    61.54    52.98    69.63   100.74   151.11   193.36
Q(atoms/ion)    0.05     0.08     0.10     0.20     0.75     1.02     0.75     1.28     2.26     4.03     5.51

Aluminium       2713
Es = 3.36eV
M2/M1          26.77    13.40     8.94     6.74     2.25     1.69        1     1.34     0.68     0.32     0.21
ETF(eV)         1059     1097     1135     2448    10297    15720    34550    22277    62825   239436   563516
Eth(eV)        23.87    14.86    12.91    12.51    16.32    18.55    24.02    20.75    29.51    44.01    56.24
Q(atoms/ion)    0.08     0.14     0.19     0.37     1.65     2.36     4.21     3.09     6.08    11.87    16.85

Silizium        2814
Es = 4.70eV
M2/M1          27.86    13.95     9.31     7.02     2.34     1.76        1     1.39     0.70     0.34     0.21
ETF(eV)         1163     1203     1244     2674    11127    16925    41072    23910    66811   252306   591200
Eth(eV)        34.56    21.21    18.22    17.52    22.45    25.47    33.61    28.45    40.41    60.23    76.96
Q(atoms/ion)    0.07     0.11     0.15     0.31     1.37     1.96     3.78     2.58     5.10    10.00    14.22

Titanium        4822
Es = 4.89eV
M2/M1          47.52    23.78    15.88    11.97     3.99     2.99        1     2.37     1.20     0.57     0.36
ETF(eV)         2054     2097     2139     4503    16949    24846   117915    33975    85653   289886   642824
Eth(eV)        59.49    31.51    23.71    20.56    19.45    21.23    34.96    23.21    31.88    46.95    59.84
Q(atoms/ion)    0.06     0.11     0.15     0.30     1.41     2.07     7.44     2.79     5.97    12.70    18.79

Vanadium        5123
Es = 5.33eV
M2/M1          50.54    25.29    16.88    12.73     4.24     3.18        1     2.52     1.28     0.61     0.39
ETF(eV)         2174     2216     2258     4744    17692    25841   130802    35219    87811   293378   646058
Eth(eV)        69.01    36.11    26.83    23.02    20.89    22.66    38.11    24.68    33.69    49.52    63.08
Q(atoms/ion)    0.06     0.10     0.14     0.28     1.33     1.96     7.52     2.64     5.70    12.25    18.22

Chromium        5224
Es = 4.12eV
M2/M1          51.58    25.82    17.23    12.99     4.33     3.25        1     2.58     1.30     0.62     0.40
ETF(eV)         2296     2340     2383     5002    18577    27091   144458    36871    91517   304121   667748
Eth(eV)        54.47    28.39    21.01    17.96    16.07    17.40    29.46    18.92    25.78    37.86    48.22
Q(atoms/ion)    0.07     0.12     0.17     0.34     1.61     2.38     9.54     3.21     6.94    14.96    22.28

Manganese       5525
Es = 2.92eV
m2/M1          54.50    27.28    18.21    13.73     4.57     3.43        1     2.72     1.38     0.66     0.42
ETF(eV)         2418     2462     2505     5250    19345    28123   158895    38166    93813   308147   672276
Eth(eV)        40.84    21.08    15.44    13.07    11.26    12.11    20.88    13.13    17.78    26.06    33.17
Q(atoms/ion)    0.09     0.15     0.21     0.42     2.02     2.99    12.79     4.04     8.82    19.18    28.71

Iron            5626
Es = 4.34eV
M2/M1          55.11    27.58    18.41    13.88     4.62     3.47        1     2.75     1.39     0.66     0.42
ETF(eV)         2544     2590     2635     5517    20270    29437   174122    39914    97826   320199   697195
Eth(eV)        61.39    31.63    23.12    19.54    16.70    17.95    31.03    19.43    26.28    38.50    49.01
Q(atoms/ion)    0.07     0.12     0.16     0.33     1.59     2.36    10.44     3.19     6.95    15.13    22.67

Cobalt          5927
Es = 4.43eV
M2/M1          58.47    29.26    19.53    14.72     4.91     3.68        1     2.92     1.48     0.70     0.45
ETF(eV)         2670     2714     2759     5768    21026    30440   190151    41153    99852   322843   698137
Eth(eV)        66.61    34.00    24.59    20.58    16.88    18.00    31.67    19.41    26.07    38.08    48.45
Q(atoms/ion)    0.07     0.12     0.16     0.32     1.56     2.31    10.92     3.13     6.89    15.15    22.82

Nickel          5928
Es = 4.46eV
m2/M1          58.25    29.15    19.46    14.67     4.89     3.67        1     2.91     1.47     0.70     0.45
ETF(eV)         2799     2846     2893     6045    22014    31860   206991    43063   104429   337404   729328
Eth(eV)        66.80    34.12    24.69    20.67    17.00    18.14    31.89    19.57    26.29    38.42    48.88
Q(atoms/ion)    0.07     0.12     0.16     0.33     1.60     2.38    11.51     3.22     7.07    15.52    23.36

Copper          6429
Es = 3.52eV
M2/M1          63.04    31.55    21.06    15.87     5.29     3.97        1     3.15     1.59     0.76     0.48
ETF(eV)         2926     2972     3017     6293    22701    32727   224652    44077   105538   335640   719012
Eth(eV)        57.25    28.90    20.64    17.07    13.27    14.01    25.17    15.02    19.98    29.08    36.96
Q(atoms/ion)    0.08     0.14     0.19     0.38     1.83     2.73    14.23     3.70     8.22    18.30    27.76

Gallium         7031
Es = 2.82eV
M2/M1          69.17    34.62    23.11    17.42     5.80     4.36        1     3.45     1.75     0.83     0.53
ETF(eV)         3187     3232     3278     6821    24324    34905   262478    46807   110381   344274   729195
Eth(eV)        50.57    25.22    17.76    14.48    10.54    10.98    20.16    11.68    15.32    22.19    28.17
Q(atoms/ion)    0.09     0.15     0.21     0.43     2.11     3.15    18.30     4.29     9.64    21.77    33.31

Germanium       7332
Es = 3.88eV
M2/M1          72.02    36.04    24.06    18.14     6.04     4.54        1     3.60     1.82     0.87     0.55
ETF(eV)         3320     3365     3410     7090    25163    36036   282661    48235   113007   349472   736476
Eth(eV)        72.61    36.03    25.23    20.46    14.46    14.99    27.74    15.87    20.69    29.89    37.93
Q(atoms/ion)    0.07     0.12     0.17     0.35     1.70     2.54    15.54     3.47     7.84    17.83    27.38

Zirconium       9140
Es = 6.33eV
M2/M1          90.50    45.29    30.24    22.79     7.59     5.70        1     4.52     2.28     1.09     0.69
ETF(eV)         4430     4478     4526     9356    32333    45807   475761    60697   137124   403744   825617
Eth(eV)       151.27    73.40    50.01    39.43    23.73    23.68    45.26    24.47    30.53    43.33    54.77
Q(atoms/ion)    0.05     0.09     0.13     0.25     1.26     1.90    15.87     2.60     6.03    14.20    22.29

Niobium         9341
Es = 7.59eV
M2/M1          92.17    46.13    30.79    23.21     7.73     5.81        1     4.60     2.33     1.11     0.71
ETF(eV)         4574     4632     4672     9653    33285    47114   503978    62377   140504   412001   840317
Eth(eV)       185.00    89.63    60.96    47.96    28.50    28.36    54.27    29.24    36.33    51.48    65.04
Q(atoms/ion)    0.05     0.08     0.11     0.23     1.13     1.69    14.61     2.33     5.40    12.75    20.04

Molybdenum      9642
Es = 6.83eV
M2/M1          95.18    47.64    31.80    23.97     7.99     6.00        1     4.75     2.40     1.14     0.73
ETF(eV)         4719     4768     4817     9945    34188    48329   533127    63907   143293   417472   847973
Eth(eV)       172.36    83.30    56.47    44.28    25.75    25.47    48.83    26.16    32.26    45.57    57.54
Q(atoms/ion)    0.05     0.09     0.12     0.24     1.20     1.81    16.27     2.49     5.80    13.77    21.73

Paladium       10646
Es = 3.91eV
M2/M1         105.56    52.83    35.27    26.58     8.86     6.65        1     5.27     2.66     1.27     0.81
ETF(eV)         5310     5360     5409    11145    37933    53400   659200    70334   155412   443386   888437
Eth(eV)       110.40    52.96    35.58    27.62    15.00    14.55    27.96    14.74    17.73    24.77    31.19
Q(atoms/ion)    0.07     0.12     0.17     0.35     1.75     2.64    27.19     3.64     8.56    20.63    32.87

Silver         10847
Es = 2.97eV
M2/M1         107.02    53.56    35.75    26.95     8.98     6.74        1     5.34     2.70     1.29     0.82
ETF(eV)         5461     5511     5562    11455    38926    54762   693123    72086   158942   452060   903991
Eth(eV)        85.12    40.80    27.37    21.22    11.42    11.05    21.24    11.18    13.39    18.69    23.52
Q(atoms/ion)    0.09     0.15     0.21     0.42     2.12     3.20    33.77     4.41    10.38    25.07    39.99

Indium         11549
Es = 2.49eV
M2/M1         114.01    57.06    38.09    28.71     9.57     7.18        1     5.69     2.88     1.37     0.88
ETF(eV)         5764     5814     5864    12065    40783    57247   763906    75196   164454   462159   916815
Eth(eV)        76.46    36.51    24.37    18.79     9.72     9.29    17.80     9.32    10.97    15.18    19.08
Q(atoms/ion)    0.09     0.17     0.23     0.47     2.35     3.56    40.53     4.92    11.65    28.40    45.60

Tantalum       18173
Es = 8.10eV
M2/M1         177.08    88.62    59.16    44.59    14.87    11.16        1     8.84     4.47     2.13     1.36
ETF(eV)         9698     9752     9806    20030    65489    90632  1936432   117444   243854   632301  1185140
Eth(eV)       403.72   189.25   123.30    92.48    37.81    33.15    57.92    31.05    31.39    40.24    49.60
Q(atoms/ion)    0.04     0.07     0.10     0.21     1.08     1.64    34.32     2.29     5.62    14.49    24.26

Tungsten       18474
Es = 8.68eV
M2/M1         182.40    91.29    60.94    45.93    15.31    11.49        1     9.11     4.60     2.19     1.40
ETF(eV)         9871     9925     9978    20376    66517    91993  1998893   119127   246680   636771  1189500
Eth(eV)       447.02   209.37   136.26   102.07    41.20    35.92    62.06    33.49    33.44    42.58    52.39
Q(atoms/ion)    0.04     0.07     0.10     0.20     1.02     1.55    33.47     2.16     5.32    13.77    23.13

Platinum       19578
Es = 5.86eV
M2/M1         193.55    96.87    64.66    48.74    16.24    12.19        1     9.67     4.88     2.33     1.49
ETF(eV)        10576    10630    10684    21800    70908    97913  2260145   126603   260626   666316  1235713
Eth(eV)       322.30   150.72    97.88    73.14    28.80    24.84    41.90    22.93    22.34    28.04    34.36
Q(atoms/ion)    0.05     0.09     0.13     0.26     1.32     2.02    47.21     2.81     6.94    18.10    30.56

Gold           19779
Es = 3.80eV
M2/M1         195.41    97.80    65.29    49.21    16.40    12.31        1     9.76     4.93     2.35     1.50
ETF(eV)        10754    10809    10863    22161    72036    99443  2328335   128546   264355   674720  1249737
Eth(eV)       211.23    98.75    64.11    47.89    18.79    16.17    27.17    14.91    14.46    18.11    22.18
Q(atoms/ion)    0.07     0.12     0.17     0.34     1.77     2.70    64.27     3.77     9.31    24.28    41.30

Lead           20782
Es = 2.03eV
M2/M1         205.55   102.87    68.67    51.76    17.25    12.95        1    10.27     5.19     2.47     1.58
ETF(eV)        11292    11347    11401    23245    75351   103894  2539888   134144   274593   695459  1280570
Eth(eV)       119.35    55.73    36.13    26.93    10.36     8.84    14.51     8.08     7.67     9.48    11.56
Q(atoms/ion)    0.10     0.18     0.26     0.52     2.67     4.08   103.45     5.69    14.09    36.98    62.78

Uranium        23892
Es = 5.42eV
M2/M1         236.15   118.19    78.90    59.47    19.82    14.88        1    11.79     5.96     2.84     1.81
ETF(eV)        13132    13187    13242    26956    86741   119219  3322159   153458   310319   769905  1395148
Eth(eV)       371.76   173.11   111.77    82.95    30.40    25.32    38.75    22.66    20.22    23.98    28.94
Q(atoms/ion)    0.05     0.09     0.13     0.27     1.37     2.10    64.29     2.94     7.33    19.52    33.53

